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Mon, Mar 17, 2025
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Volume 17, Issue 1 (Winter-Spring 2023)
IJOP 2023, 17(1): 65-72 |
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Aghajari S, Jahanbakhshian M, Karimzadeh R. Fabrication of Microfluidic and Optofluidic molds with SPE- 60 Photoresist: Advantages and Challenges. IJOP 2023; 17 (1) :65-72
URL: http://ijop.ir/article-1-546-en.html
URL: http://ijop.ir/article-1-546-en.html
1- Department of Physics, Shahid Beheshti University, Tehran, Iran
Abstract: (1141 Views)
One of the basic requirements in the fabrication of microfluidic (MF) and optofluidic (OF) chips is a suitable initial mold, which is generally prepared with the help of a photoresist material. In this research, we investigate the SPE-60 photoresist as a quality alternative to the conventional SU-8 photoresist to achieve molds with thicknesses ranging from 25μm to 130μm and address the challenges of mold-making with this photoresist. The conventional photolithography method is used to assess the material's ability in mold making. The results show that SPE-60 molds have vertical edges, clean facets, and edges, complete voids between different components, and demonstrate good pattern transfer from the photomask to the SPE-60 film at various thicknesses. This article also suggests some ways to improve accuracy and reduce edge scattering. As a result, based on the experimental results, SPE-60 can be considered a cost-effective and suitable alternative to SU-8 photoresist in the fabrication of MF and OF molds.
Type of Study: Research |
Subject:
Interaction of Light and Matter
Received: 2023/09/30 | Revised: 2024/05/28 | Accepted: 2024/02/4 | Published: 2024/02/6
Received: 2023/09/30 | Revised: 2024/05/28 | Accepted: 2024/02/4 | Published: 2024/02/6
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